High-Resolution Quantitative Cathodoluminescence (CL) for Defect Metrology in Semiconductors
Abstract: High spatial resolution spectroscopic information may be acquired by using an electron beam in a modern scanning electron microscope (SEM), exploiting a phenomenon called cathodoluminescence (CL). CL can be used to perform non-destructive analysis of a broad range of materials comprising insulators, semiconductors and metals. This approach offers several advantages over usual optical spectroscopy techniques.