The Effect of Superlattice Parameters on the Performance of SiGe/Si Thin Film Coolers

Author(s)

X. Fan, G. Zeng, C. LaBounty, J. E. Bowers, E. Croke and A. Shakouri

Publication Date

Mon, 03/12/2001 - 12:00

Publication Type

Conference

Journal/Conference Name

APS March Meeting 2001

Indexing

Seattle, WA

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