Wafer Fusion: Materials Issues and Device Results

Author(s)

A. Black, A. R. Hawkins, N. M. Margalit, D. I. Babic, A. L. Holmes, Jr., Y.-L. Chang, P. Abraham, J. E. Bowers and E. L. Hu

Publication Date

Sun, 06/01/1997 - 12:00

Publication Type

Journal

Journal/Conference Name

IEEE Journal of Selected Topics in Quantum Electronics

Indexing

3(3), 943-951

Publication File

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