Electrothermal SCS micromirror with large-vertical-displacement actuation Read more about Electrothermal SCS micromirror with large-vertical-displacement actuation Hilton Head 2004: Solid-State Sensor, Actuator and Microsystems Workshop
First Demonstration of a MEMS Tunable Vertical-Cavity SOA Read more about First Demonstration of a MEMS Tunable Vertical-Cavity SOA