A lithium niobate-Si3N4 platform on silicon by heterogeneous wafer bonding

Author(s)
L. Chang, M. H. P. Pfeiffer, N. Volet, M. Zervas, J. D. Peters, C. L. Manganelli, E. J. Stanton, Y. Li, T. J. Kippenberg, and J. E. Bowers
Publication Date
Publication Type
Conference
Journal/Conference Name
Conference on Lasers and Electro-Optics (CLEO)
Indexing
San Jose, CA
Publication File
C1034.pdf448.1 KB